F04600 - SEMI F46 - Guide for On-Site Chemical Generation (OSCG) Systems Revision:SEMI F46-0999 - Inactive robots and conveyors

robots and conveyors

If the wafers have epitaxial deposits

SEMI MF672-0412 (technical revision)

or formation technique

through to point of use (POU)

F04600 - SEMI F46 - Guide for On-Site Chemical Generation (OSCG) Systems Revision:SEMI F46-0999 - Inactive robots and conveyorsThis guide was technically approved by the global Facilities Committee and is the direct responsibility of the North American Facilities Committee. Current edition approved by the North American Regional Standards Committee on April 15, 1999. Initially available on www. semi. org August 1999; to be published September 1999. NOTICE: This Standard or Safety Guideline has an Inactive Status because the conditions to maintain Current Status have not been